| Inertial sensors including accelerometers (or | | | | electronics applications will continue to emerge. |
| accelerometer sensor of dollars) and the angular rate | | | | Intermediate grade MEMS inertial sensors for industrial |
| sensor (gyroscope) and their single, double, three-axis | | | | and automotive grade products, are mainly used in |
| combined IMU (Inertial Measurement Unit), AHRS | | | | automotive electronic stability systems (ESP or ESC) |
| (including magnetic sensor attitude reference system). | | | | GPS-assisted navigation systems, automobile airbags, |
| Is the use of MEMS accelerometer inertial sensing the | | | | vehicle attitude measurement, precision agriculture, |
| quality of force measurement sensor, the general | | | | industrial automation, large-scale medical equipment, |
| standard of quality from the block (sensor element) | | | | robotics , instruments | instruments and meters, |
| and the detection circuit. According to the different | | | | construction machinery and so on. |
| sensing principle, mainly piezoresistive, capacitive, | | | | High-precision MEMS inertial sensors as a military-grade |
| piezoelectric type, the tunnel current-type, resonance | | | | and aerospace level products, the main demand high |
| type, thermal and electromagnetic coupling type and | | | | precision, the whole temperature range, shock and |
| so on. | | | | other indices. Mainly used in wireless communications |
| In 1998, the United States CSDL design and | | | | satellite, missile seeker, optical targeting systems, |
| development of the first MEMS gyroscope. In the | | | | stability of the applications; aircraft / missile flight |
| same year, Drapor lab developed another form of | | | | control, attitude control, yaw damping control |
| MEMS gyroscope. | | | | applications, as well as medium-range missile guidance, |
| MEMS gyroscope is the use of vibration-mass has | | | | inertial-guided GPS navigation applications, remote |
| been the base (shell) driven rotation of the Coriolis | | | | aircraft ship equipment, battlefield robots. |
| effect to the principle of the angular velocity sensor | | | | For consumer electronics of MEMS inertial sensors, |
| is made. | | | | the main requirement is that the low price, small size, |
| Mainly in the form of framework-driven (inside and | | | | narrow temperature range, so accuracy is low, or |
| outside the framework of the two kinds) comb-drive | | | | even functional products. Acceleration sensors, light |
| type, electromagnetic-driven and so on. | | | | weight, power consumption is small, generally |
| IMU because it is combination of MEMS technology, | | | | measuring range 1 ~ 10g ~ 50g, Resolution 2mg ~ |
| micro-inertial measurement unit, so many places called | | | | 10mg, top general in the range ± 300 ° / s, |
| MIMU. Mainly by the three MEMS accelerometers and | | | | zero-bias in the 500 ° / h ~ 1000 ° / h, so some |
| three gyro and the solver circuit. | | | | companies products do not give a zero bias indicators |
| AHRS consists of three magnetic sensors, compared | | | | or to give 0.1 ° / s ~ 0.5 ° / s. |
| with the IMU, and based on four elements in France | | | | MEMS accelerometer can be produced at present the |
| to understand calculation, can output directly to a | | | | companies are more, most of the semiconductor, |
| sports body pitch angle, roll angle and heading angle. | | | | such as the United States, ADI, Invensense, ST, |
| Low-precision MEMS inertial sensors, as consumer | | | | Freescale, Sensor Dynamics, MSI (ICSensor), MEMSIC |
| electronics products are mainly used in mobile phones, | | | | (producer in Wuxi, China) Europe, VTI, Infine, |
| game consoles, music players, wireless mouse, digital | | | | production MEMS gyroscope's the United States, ADI, |
| cameras, PD, hard disk protector, smart toys, | | | | Knoix, ST, Europe, Infine, Methes, Japan, Murata, |
| pedometer, anti-theft system, GPS navigation, | | | | National, Oki, Fujitsu. December 3 Di Semiconductor |
| portable. Because of acceleration measurement, tilt | | | | Co., Ltd. Shenzhen, Shanghai, China issued a |
| measurement, vibration measurement and even | | | | consumer-grade MEMS gyro, a company in Wuxi is |
| rotational measurements and other basic | | | | also in development. |
| measurements, to be excavated consumer | | | | |